Estimation of Silicon Nanocrystalline Sizes from Photoluminescence Measurements of RF Co-Sputtered Si/SiO2 Films

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Date
2003Author
Ramírez Porras, Arturo
Fonseca, L. F.
Resto, O.
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A stochastic distribution of nanocrystalline sizes model is applied to fit photoluminescence
(PL) spectra of luminescent Si nanocrystals in a Si/SiO2 matrix synthesized by RF co-sputtering
on the top of quartz substrates. With this method, the PL spectra from a diverse set of samples
can be resolved mainly as the sum of two components: a contribution from a gaussian-like
distribution of sizes of quantum dots (QD) and a similar component from a distribution of
quantum wires (QW). These distributions of sizes and their associated PL energies agree well
with the so-called Smart Quantum Confinement model (SQC).
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